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UMC
Enhances 90-nm Manufacturability Using
Synopsys' Phase Shift Technology
First Foundry to
Offer Yield-Enhancing AA-PSM Technology in Volume Production Environment
MOUNTAIN VIEW, Calif., and HSINCHU, Taiwan,
December 20, 2004 -- Synopsys, Inc. (Nasdaq:SNPS), a world leader
in semiconductor design software, and UMC (NYSE:UMC) a world leading
semiconductor foundry, today announced that UMC is using Synopsys'
alternating aperture phase-shift mask (AA-PSM) technology to enhance
manufacturability for its 90-nanometer (nm) process. Manufacturability
improvements are obtained through increased lithography resolution,
a larger process window, and better performance enabled by the AA-PSM
technology. UMC can now deliver the benefits of AA-PSM to those
customers developing high-performance and low-power integrated circuits
on 90-nm technology.
"UMC constantly develops and employs new
production techniques to maintain its position as a manufacturing
efficiency leader," said Peter Huang, deputy director of the
Central Research and Development Advanced Module division at UMC.
"We are delighted to see the positive results of our AA-PSM
efforts with Synopsys for our mainstream 90 nanometer process. This
success not only enhances our current production, but also demonstrates
the viability of this solution for future process generations below
90 nanometers. Technologies now under industry development, such
as immersion lithography, have yet to be proven in a real-life manufacturing
environment, while AA-PSM has already been validated in our fab
with production silicon."
UMC and Synopsys engineers worked together to
retarget an FPGA chip to the AA-PSM process using Synopsys' DFM
flow. The flow consisted of Proteus optical proximity correction
(OPC) software, Synopsys' AA-PSM technology, SiVL
lithography verification software, HerculesTM design
rule check (DRC) and mask rule check (MRC) tools, and CATS
fracturing software. Synopsys' AA-PSM technology is the only commercially
available strong phase-shifting technology currently used by several
leading edge semiconductor companies in IC production.
"Synopsys is committed to delivering technology
and software products that help semiconductor companies accelerate
their production yield ramps on advanced process nodes," said
Edmund Cheng, vice president of Marketing, Silicon Engineering group
at Synopsys. "We are very pleased to collaborate with UMC in
applying the unique capabilities of Synopsys' AA-PSM technology
to improve lithography resolution. This successful outcome further
validates Synopsys' leadership position in providing a comprehensive
DFM solution for high-yield designs at 90-nm and below."
About Synopsys DFM
Synopsys offers the industry's most comprehensive RTL-to-Mask DFM
solution. Its DFM product family addresses critical yield and manufacturability
issues with its Proteus mask synthesis, Synopsys
PSM, CATS
mask data preparation, SiVL
lithography verification, i-Virtual StepperTM
mask defect dispositioning and TaurusTM TCAD software
products. Synopsys leverages this expertise through its industry-leading
GalaxyTM design platform implementation solution, including
the HerculesTM physical verification suite, in order
to help ensure that designs at 90nm and smaller geometries will
meet key manufacturing requirements. Synopsys' DFM product family
is the solution-of-choice for 130nm yield-sensitive, high-value
chips, worldwide. Eighty percent of all sub-180nm microprocessors,
50 percent of all sub-180nm DRAMs, 80 percent of all sub-180nm FPGA
and graphics chips, and 75 percent of all sub-180nm cellular baseband
chips produced use Proteus, and more than 80 percent of all photomasks
produced use CATS.
About UMC
UMC (NYSE: UMC, TSE: 2303) is a leading global semiconductor foundry
that manufactures advanced process ICs for applications spanning
every major sector of the semiconductor industry. UMC delivers cutting-edge
foundry technologies that enable sophisticated system-on-chip (SoC)
designs, including 90nm copper, 0.13um copper, and mixed signal/RFCMOS.
UMC is also a leader in 300mm manufacturing; Fab 12A in Taiwan and
Singapore-based UMCi are both in volume production for a variety
of customer products. UMC employs over 10,500 people worldwide and
has offices in Taiwan, Japan, Singapore, Europe, and the United
States. UMC can be found on the web at http://www.umc.com.
About Synopsys
Synopsys, Inc. (Nasdaq:SNPS) is a world leader in electronic design
automation (EDA) software for semiconductor design. The company
delivers technology-leading semiconductor design and verification
platforms and IC manufacturing software products to the global electronics
market, enabling the development and production of complex systems-
on -chips (SoCs). Synopsys also provides intellectual property and
design services to simplify the design process and accelerate time-to-market
for its customers. Synopsys is headquartered in Mountain View, California
and has offices in more than 60 locations throughout North America,
Europe, Japan and Asia. Visit Synopsys online at http://www.synopsys.com/.
Synopsys,
CATS and SiVL are registered trademarks of Synopsys, Inc. Galaxy,
Hercules, i-Virtual Stepper and Taurus are trademarks of
Synopsys. All other trademarks or registered trademarks mentioned
in this release are the intellectual property of their respective
owners.
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